CABL-UH is higher acceleration voltage model. You can select 90kV, 110kV or 130kV
Beam diameter: <1.6 nmΦ
Minimum line width: 7 nm (at 130kV)
Accerelation Voltage: 130 kV, 110 kV or 90 kV
Stage size: 8 inch wafer
Crestec Corporation provides foundry service of EB lithography. We can expose fine grating patterns for DFB-LD production, and also any kind of R&D patterns. We have much experiences of EB lithography more than 20 years. Please feel free to contact us with your preferred pattern layout.